What Does Extreme Ultraviolet Lithography (EUVL) Mean?
Extreme ultraviolet lithography (EUVL) is an advanced, highly precise lithography technique that allows for the manufacturing of microchips with features small enough to support 10 Ghz clock speeds.
Techopedia Explains Extreme Ultraviolet Lithography (EUVL)
In contrast, EUVL technology uses an ultraviolet light source and lenses to focus the light. This is not as precise because of the limitation of the lenses.
